Wafer‑Level Femtosecond‑Laser TGV Equipment

คุณสมบัติเครื่องจักร

1. Flexible dimensional compatibility, supporting all‑specification wafers under 300 mm

2. Femtosecond‑laser‑enabled machining for high throughput and superior processing quality

3. Self‑developed process‑and‑control system

4. Integrated high‑precision automatic wafer alignment system

5. Fully‑automatic unattended operation

6. Numerous proprietary intellectual‑property rights and core technologies.


อุตสาหกรรมที่ใช้งาน

Han's Laser self‑developed TGV (Through‑Glass Via) processing equipment delivers stable and reliable performance in mass production. It is widely used for machining multi‑size blind holes, profile‑shaped holes and conical holes, and possesses broad application potential in advanced packaging, display manufacturing, consumer‑electronics and life‑science industries.


อุตสาหกรรมแผงจอ OLED และ LCD
อุตสาหกรรมเซมิคอนดักเตอร์
Technical Data Sheet

Machine Model

Wafer‑Level   Femtosecond‑Laser TGV Equipment

Max. Machining Size

12‑inch

Hole Positioning Accuracy

3μm

Operating Speed

≥800mm/s

Hole Roundness

(Outer‑hole & Inner‑hole)

≥95% (major‑axis / minor‑axis)

Hole‑wall Surface Roughness

≤100nm (subject to workpiece material   and etching performance)


Top